RBS and ERD characterization of SiON films for optical waveguide applications
| Autor: | Climent-Font, A., Pászti, F., Muñoz-Martín, A., Ruiz, E., Garrido, J., Pernas, P.L. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B October 2005 240(1-2):440-444 |
| Databáze: | ScienceDirect |
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