An ECR ion source directly excited in a selected microwave mode cavity resonator for material processing
| Autor: | Asaji, Toyohisa, Sasaki, Hiroshi, Furuki, Hideyuki, Kato, Yushi, Ishii, Shigeyuki, Kanazawa, Motoichi, Saito, Junji |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2005 237(1-2):262-266 |
| Databáze: | ScienceDirect |
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