Influence of co-implantation on the activation and diffusion of ultra-shallow extension implantation
| Autor: | Herden, Marc, Gehre, Daniel, Feudel, Thomas, Wei, Andy, Bersani, Massimo, Mannino, Giovanni, Berg, Jaap v.d. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2005 237(1-2):203-207 |
| Databáze: | ScienceDirect |
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