Formation of β-FeSi2 by implanting multicharged iron ions produced in an ECR ion source
Autor: | Tomida, Masashi, Kato, Yushi, Asaji, Toyohisa |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B August 2005 237(1-2):83-87 |
Databáze: | ScienceDirect |
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