Determination of local lattice tilt in Si1−xGex virtual substrate using high resolution channeling contrast microscopy
| Autor: | Seng, H.L., Osipowicz, T., Zhang, J., Tok, E.S., Watt, F. |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B April 2005 231(1-4):446-451 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect