Nano-structure and tribological properties of B+ and Ti+ co-implanted silicon nitride
| Autor: | Nakamura, Naoki a, b, *, Noda, Katsutoshi a, Yamauchi, Yukihiko c |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B January 2005 227(3):299-305 |
| Databáze: | ScienceDirect |
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