Trends to a semi-empirical model for cluster induced metal sputtering
Autor: | Brunelle, Alain, Della-Negra, Serge |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2004 222(1):68-74 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Brunelle, Alain, Della-Negra, Serge |
---|---|
Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2004 222(1):68-74 |
Databáze: | ScienceDirect |
Externí odkaz: |