Study of the chemical and morphological evolution of the GaAs surface after high fluence focused ion beam exposure
Autor: | Lugstein, A. ∗, Basnar, B., Bertagnolli, E. |
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Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2004 217(3):402-408 |
Databáze: | ScienceDirect |
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