Maskless Mn implantation in GaAs using focused Mn ion beam
| Autor: | Itou, M., Kasai, M., Kimura, T., Yanagisawa, J., Wakaya, F., Yuba, Y., Gamo, K. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2003 206:1013-1017 |
| Databáze: | ScienceDirect |
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