Etching rate and structural modification of polymer films during low energy ion irradiation
| Autor: | Zaporojtchenko, V., Zekonyte, J., Erichsen, J., Faupel, F. |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2003 208:155-160 |
| Databáze: | ScienceDirect |
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