Development of a continuously variable energy radio frequency quadrupole accelerator for SiC power semiconductor device fabrication
| Autor: | Amemiya, Kensuke, Ito, Junya, Ohno, Toshiyuki, Yasuda, Toshio, Ohyanagi, Takasumi, Watanabe, Atsuo |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2002 188(1):247-250 |
| Databáze: | ScienceDirect |
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