Effect of nitrogen segregation on TED and loss of phosphorus in CZ-Si
| Autor: | Fujiwara, N, Saito, K, Nakabayashi, Y, Osuman, H.I, Toyonaga, K, Matsumoto, S, Sato, Y |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2002 186(1):313-317 |
| Databáze: | ScienceDirect |
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