Theoretical and experimental investigations of defect evolution in silicon carbide during N + and Al + ion implantation taking into account internal stress fields
| Autor: | Rybin, P.V., Kulikov, D.V., Trushin, Yu.V., Yankov, R.A., Voelskow, M., Scharmann, F., Pezoldt, J. * |
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| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2001 178(1):269-274 |
| Databáze: | ScienceDirect |
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