Modeling layer-by-layer growth in ion beam assisted deposition of thin films
| Autor: | Koponen, Ismo T. * |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2000 171(3):314-324 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Koponen, Ismo T. * |
|---|---|
| Zdroj: | In Nuclear Inst. and Methods in Physics Research, B 2000 171(3):314-324 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect