Characteristics of tantalum pentoxide dielectric films deposited on silicon by excimer-lamp assisted photo-induced CVD using an injection liquid source
| Autor: | Mooney, M.B., Hurley, P.K., O'Sullivan, B.J., Beechinor, J.T., Zhang, J.-Y., Boyd, I.W., Kelly, P.V., Sénateur, J.-P., Crean, G.M., Jimenez, C., Paillous, M. |
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| Zdroj: | In Microelectronic Engineering 1999 48(1):283-286 |
| Databáze: | ScienceDirect |
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