Ti/TiN/Ti(N) PVD liners for W-plug applications
| Autor: | Daniels, S *, Wolters, R.A.M, van Zijl, J, Schildermans, J |
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| Zdroj: | In Microelectronic Engineering 2000 50(1):271-276 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Daniels, S *, Wolters, R.A.M, van Zijl, J, Schildermans, J |
|---|---|
| Zdroj: | In Microelectronic Engineering 2000 50(1):271-276 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect