Thin films of CoSi 2 on Si 1− yC y substrate layers

Autor: Teichert, S. *, Falke, M., Giesler, H., Sarkar, D.K., Beddies, G., Hinneberg, H.-J., Lippert, G., Griesche, J., Osten, H.J.
Zdroj: In Microelectronic Engineering 2000 50(1):193-197
Databáze: ScienceDirect