Influence of TiSi 2 formation temperature on film thermal stability
| Autor: | Sabbadini, A *, Cazzaniga, F, Marangon, T |
|---|---|
| Zdroj: | In Microelectronic Engineering 2000 50(1):159-164 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Sabbadini, A *, Cazzaniga, F, Marangon, T |
|---|---|
| Zdroj: | In Microelectronic Engineering 2000 50(1):159-164 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect