Properties and mutual interactions of various acrylate monomers used in 193 nm resists
| Autor: | Paniez, P.J., Perrier, F., Panabiere, M., Mortini, B., Rosilio, C. |
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| Zdroj: | In Microelectronic Engineering 1999 46(1):393-396 |
| Databáze: | ScienceDirect |
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