Modified AlAs epitaxial layers for use as pattern transfer masks
| Autor: | Smith, C.J.M., Krauss, T.F., Murad, S.K., Wilkinson, C.D.W., Boyd, A., Stanley, C.R., Dawson, M., De La Rue, R.M. |
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| Zdroj: | In Microelectronic Engineering 1999 46(1):327-330 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect