Tip-on-tip: a novel AFM tip configuration for the electrical characterization of semiconductor devices
| Autor: | Hantschel, T., Trenkler, T., Vandervorst, W., Malavé, A., Büchel, D., Kulisch, W., Oesterschulze, E. |
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| Zdroj: | In Microelectronic Engineering 1999 46(1):113-116 |
| Databáze: | ScienceDirect |
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