Feasibility study of fabricating 20 nm resolution dielectric Fresnel zone plates with ultrahigh aspect ratio for EUV optics
| Autor: | Wu, Qingxin, Chen, Qiucheng, Quan, Hao, Tong, Xujie, Zhao, Jun, Chen, Yifang |
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| Zdroj: | In Microelectronic Engineering 15 September 2024 292 |
| Databáze: | ScienceDirect |
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