Characterization of AlGaN/GaN degradations during plasma etching for power devices
| Autor: | Le Roux, Frédéric, Possémé, Nicolas, Burtin, Pauline, Gergaud, Patrice, Delaye, Vincent |
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| Zdroj: | In Microelectronic Engineering 15 September 2021 249 |
| Databáze: | ScienceDirect |
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