Mobility improvement of LTPS thin film transistor using stacked capping layer
| Autor: | Kim, Taeyong, Shin, Donggi, Park, Jinsu, Pham, Duy Phong, Yi, Junsin |
|---|---|
| Zdroj: | In Microelectronic Engineering 15 July 2021 247 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
| Autor: | Kim, Taeyong, Shin, Donggi, Park, Jinsu, Pham, Duy Phong, Yi, Junsin |
|---|---|
| Zdroj: | In Microelectronic Engineering 15 July 2021 247 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect