Mechanical modeling of metal thin films on elastomers for femtosecond laser patterned interconnects
| Autor: | Turjeman, I., Dotan, Tali, Berg, Y., Kotler, Z., Sherman, D., Shacham-Diamand, Y. |
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| Zdroj: | In Microelectronic Engineering 15 March 2021 241 |
| Databáze: | ScienceDirect |
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