Soft and flexible gold microelectrodes by supersonic cluster beam deposition and femtosecond laser processing
| Autor: | Dotan, Tali, Berg, Yuval, Migliorini, Lorenzo, Villa, Sara Moon, Santaniello, Tommaso, Milani, Paolo, Shacham-Diamand, Yosi |
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| Zdroj: | In Microelectronic Engineering 15 January 2021 237 |
| Databáze: | ScienceDirect |
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