μ-Coriolis mass flow sensor with improved flow sensitivity through modelling of the sensor
Autor: | Schut, T.V.P., Wiegerink, R.J., Lötters, J.C. |
---|---|
Zdroj: | In Microelectronic Engineering 1 April 2020 226 |
Databáze: | ScienceDirect |
Externí odkaz: |
Autor: | Schut, T.V.P., Wiegerink, R.J., Lötters, J.C. |
---|---|
Zdroj: | In Microelectronic Engineering 1 April 2020 226 |
Databáze: | ScienceDirect |
Externí odkaz: |