Thermally activated discharging mechanisms in SiNx films with embedded CNTs for RF MEMS capacitive switches
| Autor: | Koutsoureli, M., Stavrinidis, G., Birmpiliotis, D., Konstantinidis, G., Papaioannou, G. |
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| Zdroj: | In Microelectronic Engineering 15 February 2020 223 |
| Databáze: | ScienceDirect |
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