Large area Silicon-energy filters for ion implantation
| Autor: | Steinbach, T., Csato, C., Krippendorf, F., Letzkus, F., Rüb, M., Burghartz, J.N. |
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| Zdroj: | In Microelectronic Engineering 1 February 2020 222 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Steinbach, T., Csato, C., Krippendorf, F., Letzkus, F., Rüb, M., Burghartz, J.N. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 February 2020 222 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect