Modification of Ge-rich GeSbTe surface during the patterning process of phase-change memories
| Autor: | Canvel, Yann, Lagrasta, Sébastien, Boixaderas, Christelle, Barnola, Sébastien, Mazel, Yann, Dabertrand, Karen, Martinez, Eugénie |
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| Zdroj: | In Microelectronic Engineering 15 January 2020 221 |
| Databáze: | ScienceDirect |
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