Growth of ZnO nanowires on seeding layers deposited by ALD: The influence of process parameters
| Autor: | Kerasidou, A.P., Bardakas, A., Botzakaki, M., Georga, S.N., Krontiras, C.A., Mergia, K., Psycharis, V.P., Tsamis, C. |
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| Zdroj: | In Microelectronic Engineering 15 September 2019 217 |
| Databáze: | ScienceDirect |
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