Small and sensitive force sensors based on contact resistance
| Autor: | Higashisaka, Tatsuya, Nagato, Keisuke, Tomizawa, Morio, Tanaka, Eitaro, Watanabe, Haruhiko, Nakao, Masayuki |
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| Zdroj: | In Microelectronic Engineering 15 August 2019 216 |
| Databáze: | ScienceDirect |
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