Dose regularization via filtering and projection: An open-source code for optimization-based proximity-effect-correction for nanoscale lithography
| Autor: | Eriksen, Emil H., Nazir, Adnan, Balling, Peter, Vester-Petersen, Joakim, Christiansen, Rasmus E., Sigmund, Ole, Madsen, Søren P. |
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| Zdroj: | In Microelectronic Engineering 5 November 2018 199:52-57 |
| Databáze: | ScienceDirect |
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