Influence of the hard masks profiles on formation of nanometer Si scalloped fins arrays
| Autor: | Zhang, Qingzhu, Tu, Hailing, Yin, Huaxiang, Wei, Feng, Li, Junjie, Meng, Lingkuan, Zhang, Zhaohao, Yan, Jiang, Zhao, Hongbin, Ma, Tongda, Zhou, Zhangyu, Fan, Yanyan, Du, Jun |
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| Zdroj: | In Microelectronic Engineering 15 October 2018 198:48-54 |
| Databáze: | ScienceDirect |
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