Transfer durability and fidelity of hard release-agent-free replica mold by repetition of ultraviolet nanoimprint lithography
| Autor: | Tsuchiya, Junpei, Hiwasa, Shin, Taniguchi, Jun |
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| Zdroj: | In Microelectronic Engineering 5 June 2018 193:98-104 |
| Databáze: | ScienceDirect |
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