Parasitic parameters of thin film structures created on flexible substrates in PVD process

Autor:	Korzeniewska, Ewa, Szczęsny, Artur
Zdroj:	In Microelectronic Engineering 5 June 2018 193:62-64
Databáze:	ScienceDirect
Externí odkaz:	Zobrazit plný text záznamu Full Text from ScienceDirect