Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching

Autor: Koch, Felix, Lehr, Dennis, Schönbrodt, Oliver, Glaser, Tilman, Fechner, Renate, Frost, Frank
Zdroj: In Microelectronic Engineering 5 May 2018 191:60-65
Databáze: ScienceDirect