Manufacturing of highly-dispersive, high-efficiency transmission gratings by laser interference lithography and dry etching
Autor: | Koch, Felix, Lehr, Dennis, Schönbrodt, Oliver, Glaser, Tilman, Fechner, Renate, Frost, Frank |
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Zdroj: | In Microelectronic Engineering 5 May 2018 191:60-65 |
Databáze: | ScienceDirect |
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