Self-aligned gate-last process for quantum-well InAs transistor on insulator
| Autor: | Cheng, Qi, Wang, Zilun, Shariar, Kazy, Khandelwal, Sourabh, Zeng, Yuping |
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| Zdroj: | In Microelectronic Engineering 5 May 2018 191:42-47 |
| Databáze: | ScienceDirect |
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