Enhancement in structure stability of gold micro-cantilever by constrained fixed-end in MEMS devices
| Autor: | Teranishi, Minami, Chen, Chun-Yi, Chang, Tso-Fu Mark, Konishi, Toshifumi, Yamane, Daisuke, Machida, Katsuyuki, Masu, Kazuya, Sone, Masato |
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| Zdroj: | In Microelectronic Engineering 5 February 2018 187-188:105-109 |
| Databáze: | ScienceDirect |
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