Optical fiber Fabry-Pérot micro-displacement sensor for MEMS in-plane motion stage
| Autor: | Kim, Yong-Sik, Dagalakis, Nicholas G., Choi, Young-Man |
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| Zdroj: | In Microelectronic Engineering 5 February 2018 187-188:6-13 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect