Interaction of work function tuning and negative bias temperature instability for future nodes

Autor: Pantisano, Luigi, Srinivasan, Purushothaman, Kim, Taehoon, Chu, Tao, Ozbek, Merve, Zainuddin, Abu Naser, Hasanuzzaman, M., Dag, Sefa, Paliwoda, P., Bajaj, M., Kannan, Balaji, Kota, Murali, Zhao, Kai
Zdroj: In Microelectronic Engineering 25 June 2017 178:258-261
Databáze: ScienceDirect
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