Enhanced reliability and capacitance stability of ZrO2-based decoupling capacitors by interface doping with Al2O3
| Autor: | Mart, C., Zybell, S., Riedel, S., Czernohorsky, M., Seidel, K., Weinreich, W. |
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| Zdroj: | In Microelectronic Engineering 25 June 2017 178:254-257 |
| Databáze: | ScienceDirect |
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