Improvement of etching and cleaning methods for integration of raised source and drain in FD-SOI technologies
| Autor: | Labrot, M., Cheynis, F., Barge, D., Maury, P., Juhel, M., Lagrasta, S., Müller, P. |
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| Zdroj: | In Microelectronic Engineering 5 August 2017 180:56-64 |
| Databáze: | ScienceDirect |
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