Fluid flow in UV nanoimprint lithography with patterned templates
| Autor: | Jain, Akhilesh, Spann, Andrew, Cochrane, Andrew, Randall Schunk, P., Bonnecaze, Roger T. |
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| Zdroj: | In Microelectronic Engineering 5 April 2017 173:62-70 |
| Databáze: | ScienceDirect |
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