Deep plasma etching of Parylene C patterns for biomedical applications
| Autor: | Lecomte, Aziliz, Lecestre, Aurélie, Bourrier, David, Blatché, Marie-Charline, Jalabert, Laurent, Descamps, Emeline, Bergaud, Christian |
|---|---|
| Zdroj: | In Microelectronic Engineering 5 June 2017 177:70-73 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
|
Full Text from ScienceDirect