Electrode configurations for layered-plate piezoelectric micro-actuators
| Autor: | Nguyen, Cuong H., Farghaly, Mahmoud A., Akram, Muhammad N., Hanke, Ulrik, Halvorsen, Einar |
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| Zdroj: | In Microelectronic Engineering 25 April 2017 174:59-63 |
| Databáze: | ScienceDirect |
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