Complex 3D structures via double imprint of hybrid structures and sacrificial mould techniques
| Autor: | Steinberg, Christian, Rumler, Maximilian, Runkel, Manuel, Papenheim, Marc, Wang, Si, Mayer, Andre, Becker, Marco, Rommel, Mathias, Scheer, Hella-Christin |
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| Zdroj: | In Microelectronic Engineering 25 May 2017 176:22-27 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect