High aspect ratio metal microcasting by hot embossing for X-ray optics fabrication
| Autor: | Romano, L., Vila-Comamala, J., Kagias, M., Vogelsang, K., Schift, H., Stampanoni, M., Jefimovs, K. |
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| Zdroj: | In Microelectronic Engineering 25 May 2017 176:6-10 |
| Databáze: | ScienceDirect |
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Full Text from ScienceDirect