Fabrication and characterization of dual AFM probe with narrow-gapped silicon tips and switchable cantilevers with magneto-strictive FePd film actuator
| Autor: | Mineta, Takashi, Kawashima, Kenta, Taguchi, Ryoga |
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| Zdroj: | In Microelectronic Engineering 25 January 2017 168:45-49 |
| Databáze: | ScienceDirect |
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