Influence of discrete drop locations on film thickness uniformity in UV- nanoimprint lithography
| Autor: | Singhal, Shrawan, Sreenivasan, S.V. |
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| Zdroj: | In Microelectronic Engineering 1 October 2016 164:139-144 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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| Autor: | Singhal, Shrawan, Sreenivasan, S.V. |
|---|---|
| Zdroj: | In Microelectronic Engineering 1 October 2016 164:139-144 |
| Databáze: | ScienceDirect |
| Externí odkaz: |
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Full Text from ScienceDirect